Research-Thermal Evaporator
Organic and Metal Film Deposition for OLED Research
장비·기술
디스플레이 장비
세계 최초를 만드는 ICD의 디스플레이 장비 기술, 독자 공정과 양산 장비를 확인합니다.
디스플레이 장비 / 양산·연구 시스템
대면적 양산 장비에서 연구용 증착 시스템까지.
Production experience in OLED, LTPO, LTPS and Oxide TFT connects etch, ashing, surface treatment and deposition in one equipment portfolio.
기술 정보 보기
Technical Information
PROCESS
- Plasma Treatment
- Organic Deposition
- Metal Deposition
- Encapsulation
APPLICATIONS
- Research OLED
- Small-glass OLED panel fabrication
INTRODUCTION
- Research equipment specialized for treatment and organic / metal deposition on small glass substrates.
TECHNOLOGY
- Small-deposit full-auto process after plasma treatment
- Reliable OLED panel fabrication
- Optimized for process changes and customer requirements
FEATURES
- Glass Size: ~200 × 200 mm
- Vacuum Range (HV): E-7 Torr
- Vacuum Range (UHV): E-8 Torr
- Organic Source Temperature: ~450°C
- Metal Source Temperature: ~1800°C
- Plasma Treatment Gas: N₂ · O₂ · Ar · ETC.