Equipment & Technology
ESC & Components
Explore the proprietary ESC & Components technology and production platforms behind ICD world firsts.
VERTICALLY INTEGRATED
ESC technology from design to surface treatment.
Vertical integration with ICD Materials enables rapid development of ESC solutions optimized for equipment and process needs.
DISPLAY ESC
Dry Etch Advanced ESC
Substrate Clamping and Cooling for Large-Area Dry Etching
ICDM products & specifications ↗SEMICONDUCTOR ESC
Semiconductor ESC
Substrate Clamping and Multi-Zone Thermal Control for Semiconductors
ICDM products & specifications ↗