01
Dry Etch
Dry Etch Advanced ESC
| Process | Metal / Non-Metal |
|---|---|
| Cooling | +30% (vs. Conventional) |
| Generation | Up to Gen 8.6 |
| ESC Type | Unipolar |
FAMILY SITE / ICDM
ICD Materials
MATERIALS · SURFACE TREATMENT · COMPONENTS
Display AMOLED ESC Line-up
Display AMOLED ESC Technology & Product Portfolio
ESC products optimized for AMOLED etching, evaporation and thin-film processes
02
PVD / Sputtering
Sputter Bipolar ESC
| Process | Sputter / PVD |
|---|---|
| Function | GLS Slip / Cooling |
| Generation | Up to Gen 8.6 |
| ESC Type | Bipolar |
03
CVD Process
CVD ESC
| Process | CVD |
|---|---|
| Max. Temperature | Up to 300 ℃ |
| RF Power | ~ 0.6 W/cm² |
| ESC Type | Bipolar |
04
Evaporation (OLED)
Evaporator Bipolar ESC
| Process | Evaporation (OLED) |
|---|---|
| Flatness Control | ≤ 50 ㎛ |
| Generation | Up to Gen 8.6-h |
| ESC Type | Bipolar |
Semiconductor ESC Line-up
Semiconductor ESC Technology & Product Portfolio
Process-temperature-optimized ESC products with Multi-Zone temperature control
01
Artic-ESC
PVD / Sputter / Etch
−40 ℃ ~ 20 ℃
- Al₂O₃ Ceramic Sheet
- Cooling Optimized
- Low Particle
02
RT-ESC
PVD / Sputter / Etch
20 ℃ ~ 80 ℃
- Al₂O₃ Ceramic Sheet
- Thermal Stability
- Multi-Zone Option
03
HT-ESC
Metal Deposition / Metal Etch
80 ℃ ~ 150 ℃
- Multi-Zone Structure
- Plasma Resistance
- Thermal Uniformity
04
UHT-ESC
CVD / High Temp Process
150 ℃ ~
- Al₂O₃ / AlN Ceramic
- Heater
- Multi-Zone Structure
MULTI-ZONE TEMPERATURE CONTROL
View full-size imageESC Type & Temperature Uniformity
Temperature uniformity by ESC structure
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ICD Materials
ICD Materials was established on June 1, 2018 through a physical spin-off from ICD, primarily to manufacture and sell electrostatic chuck (ESC) equipment for AMOLED and LCD equipment. Its headquarters and factory are located in Daedeok-myeon, Anseong-si, Gyeonggi-do, Korea.
The company was certified as a venture enterprise by the Small and Medium Business Administration under Article 25 of the Act on Special Measures for the Promotion of Venture Businesses.
Business Areas
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High Performance Products Provide
Component Total Solution: materials, surface treatment and components
ESC Technology
Material development, in-house design, thermal spray coating, machining and polishing
Material & Coating Technology
Microstructure and property comparisons for APS, SPS, G-APS and functional coatings
ICD MATERIALS / LOCATION