BDF
Via and Fine-Interconnect Etching for Advanced Packaging
View details↗Equipment & Technology
Equipment & Technology
Explore the proprietary Equipment & Technology technology and production platforms behind ICD world firsts.
PROCESS-DRIVEN ARCHITECTURE
One path from technology to equipment
01
Principle
Explain the plasma source, control mechanism and core technology.
→02
Process value
Show how the technology solves yield, productivity and quality challenges.
→03
Product connection
Connect each process need to the right ICD platform and equipment.
The right equipment.At a glance.
Explore each product family and its purpose. Open a product for detailed technical information.
Semiconductor Equipment
Advanced Packaging
Systems for fine-interconnect processing and dielectric film deposition in advanced packaging.
Semiconductor Equipment
Semiconductor Front End
Precision wafer etching, photoresist stripping and residue removal.
Display Equipment
Display pattern etching, pre-evaporation treatment, vacuum transfer and research deposition.
DRY Etcher
Display Pattern EtchingDisplay Pattern Etching for OLED and LCD
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DRY Etcher
Pre-Evaporation Plasma TreatmentPlasma Treatment Before OLED Evaporation
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Vacuum Transfer
In-Line Vacuum Transfer System
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EV
Organic and Metal Film Deposition for OLED Research
View details↗ESC & Components
Electrostatic chucks for substrate clamping and temperature control across process applications.