Research-Thermal Evaporator
Organic and Metal Film Deposition for OLED Research
Equipment & Technology
Display Equipment
Explore the proprietary Display Equipment technology and production platforms behind ICD world firsts.
DISPLAY EQUIPMENT / PRODUCTION SYSTEMS
From large-area production tools to research deposition systems.
Production experience in OLED, LTPO, LTPS and Oxide TFT connects etch, ashing, surface treatment and deposition in one equipment portfolio.
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Technical Information
PROCESS
- Plasma Treatment
- Organic Deposition
- Metal Deposition
- Encapsulation
APPLICATIONS
- Research OLED
- Small-glass OLED panel fabrication
INTRODUCTION
- Research equipment specialized for treatment and organic / metal deposition on small glass substrates.
TECHNOLOGY
- Small-deposit full-auto process after plasma treatment
- Reliable OLED panel fabrication
- Optimized for process changes and customer requirements
FEATURES
- Glass Size: ~200 × 200 mm
- Vacuum Range (HV): E-7 Torr
- Vacuum Range (UHV): E-8 Torr
- Organic Source Temperature: ~450°C
- Metal Source Temperature: ~1800°C
- Plasma Treatment Gas: N₂ · O₂ · Ar · ETC.